Method and apparatus for vapor generation and film deposition

Method and apparatus for vapor stream discrimination

Method and apparatus for writing oxide film

Method and apparatus of forming thin films

Method and apparatus to control the formation of layers...

Method and apparatus to produce large inductive plasma for...

Method and device for coating a substrate

Method and device for correcting pattern film on a...

Method and device for depositing a lubricant layer to manufactur

Method and device for forming ultrafine particle film of compoun

Method and device for irradiating an ion beam, and related...

Method and device for plasma CVD

Method and device for plasma vapor chemical deposition of homoge

Method and device for plasma-treating the surface of...

Method and device for rotating a wafer

Method and device for thermal treatment of substrates

Method and device for vacuum-coating a substrate

Method and means for controlled-profile coating of glass contain

Method and structure for baking a wafer

Method and system for binding halide-based contaminants