Method and device for correcting pattern film on a...

Details Method and device for correcting pattern film on a... Method and device for correcting pattern film on a...

2005-05-10

2005-05-10

Hassanzadeh, Parviz (Department: 1763)

Coating apparatus

Gas or vapor deposition

With treating means

C156S345500

Reexamination Certificate

active

06890387

ABSTRACT:
In order to correct a white defect on a surface of a substrate, the substrate is held with the surface facing downward, laser light is upward irradiated at the defect on the surface in material gas, and as a result, the white defect is covered with film.

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