Coating apparatus – Gas or vapor deposition – With treating means
Patent
1989-09-05
1990-05-01
Bueker, Richard
Coating apparatus
Gas or vapor deposition
With treating means
118715, 118726, C23C 1424
Patent
active
049209191
ABSTRACT:
In depositing a lubricant layer on a protection layer of a magnetic base, a lubricant is vaporized in a hollow space which is kept at a predetermined temperature under ambient pressure. The predetermined temperature is between 100.degree. C. and 300.degree. C. in consideration of the material of the protection layer and the vapor pressure of the lubricant. Preferably, the vaporization of the lubricant is carried out in a thermostatic chamber which defines a hollow space divided by a mesh partition into upper and lower chambers. The magnetic base and the lubricant are placed in the upper chamber with the lubricant held in a boat while a heater is disposed in the lower chamber.
REFERENCES:
patent: 3466156 (1969-09-01), Peters
patent: 3619283 (1971-11-01), Carpenter
patent: 3634040 (1972-01-01), Johnson
patent: 3719525 (1973-03-01), Patel
patent: 4069360 (1978-01-01), Yanagisawa
patent: 4171388 (1979-10-01), Allen
patent: 4390601 (1983-06-01), Ono
Matsudaira Takeo
Suzuki Hisanori
Bueker Richard
Hoya Corporation
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