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Gas treatment apparatus

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Gas treatment apparatus

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Gas treatment apparatus

Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Reexamination Certificate

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Gas treatment apparatus and method

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Gas tube with heating apparatus

Coating apparatus – Gas or vapor deposition
Patent

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Gas valve assembly and apparatus using the same

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Gas vent system for a vacuum chamber

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Gas-admission element for CVD processes, and device

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Gas-based backside protection during substrate processing

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Gas-based backside protection during substrate processing

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Gas-based substrate protection during processing

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Gas-cooled clamp for RTP

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Gas-driven rotation apparatus and method for forming silicon...

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Gas-feed nozzle for a pyrolytic particle coating apparatus

Coating apparatus – Gas or vapor deposition – Means to coat or impregnate particulate matter
Patent

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Gas-purged vacuum valve

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Gaseous phase chemical treatment reactor

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Gaseous phase method accumulated film manufacturing apparatus

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Gate electrode connection structure by in situ chemical...

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Gate valve and vacuum container for semiconductor processing...

Coating apparatus – Gas or vapor deposition – Chamber seal
Reexamination Certificate

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Glass coating apparatus

Coating apparatus – Gas or vapor deposition
Patent

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