Gas-cooled clamp for RTP

Details Gas-cooled clamp for RTP Gas-cooled clamp for RTP

2006-04-25

2006-04-25

Kackar, Ram N (Department: 1763)

Coating apparatus

Gas or vapor deposition

With treating means

C118S728000, C118S725000, C156S345510, C156S345520, C156S345530, C361S234000, C279S128000, C204S192100, C204S298010

Reexamination Certificate

active

07033443

ABSTRACT:
The present invention is directed to a semiconductor thermal processing apparatus and a method for thermally cooling a semiconductor substrate. According to one aspect of the present invention, a gas-cooled clamp and associated method is disclosed which provides cooling of a substrate by thermal conduction generally in the free molecular regime. The gas-cooled clamp comprises a clamping plate having a plurality of protrusions that define gaps therebetween, wherein a distance or depth of the gaps are associated with a mean free path of the cooling gas therein. The gas-cooled clamp further comprises a pressure control system operable to control a backside pressure of the cooling gas within the plurality of gaps to thus control a heat transfer coefficient of the cooling gas, wherein the heat transfer coefficient of the cooling gas is primarily a function of the pressure and substantially independent of the gap distance.

REFERENCES:
patent: 5583736 (1996-12-01), Anderson et al.
patent: 5805408 (1998-09-01), Maraschin et al.
patent: 5810933 (1998-09-01), Mountsier et al.
patent: 5838529 (1998-11-01), Shufflebotham et al.
patent: 6073576 (2000-06-01), Moslehi et al.
patent: 6378600 (2002-04-01), Moslehi
patent: 2001/0011425 (2001-08-01), Granneman et al.
patent: 2002/0139307 (2002-10-01), Ryding et al.
patent: 2003/0030960 (2003-02-01), Kanno et al.

Affiliated with

Also associated with

Rating

Gas-cooled clamp for RTP does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Gas-cooled clamp for RTP, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Gas-cooled clamp for RTP will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3612931