Gas valve assembly and apparatus using the same

Details Gas valve assembly and apparatus using the same Gas valve assembly and apparatus using the same

2008-06-03

2008-06-03

Zervigon, Rudy (Department: 1792)

Coating apparatus

Gas or vapor deposition

C156S345330, C156S345340

Reexamination Certificate

active

07381274

ABSTRACT:
A gas valve assembly for a deposition apparatus includes: a driving shaft including a plurality of gas supply paths therein; a housing surrounding the driving shaft and including a plurality of through holes therein; a plurality of magnetic seal pairs between the driving shaft and the housing, the plurality of magnetic seal pairs including a magnetic fluid; and a leakage-preventing means between the driving shaft and the housing, the leakage-preventing means preventing a leakage of the magnetic fluid.

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English translation of JP2002-280374.

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