Film to tie up loose fluorine in the chamber after a clean...

Film uniformity by selective pressure gradient control

Film-forming apparatus

Film-forming apparatus and film-forming method

Film-forming apparatus for forming a deposited film on a...

Film-forming device with a substrate rotating mechanism

Fine-particle classification apparatus and functional...

Fixing member for evaporation apparatus

Fixing structures and supporting structures of ceramic...

Fixing structures and supporting structures of ceramic...

Fixture for deposition

Fixture for masking a portion of an airfoil during application o

Fixture for VPE reactor

Flame stabilizer for stagnation flow reactor

Flash vaporizer system for use in manufacturing optical waveguid

Flat antenna having openings provided with conductive...

Flat antenna having rounded slot openings and plasma...

Flexibly suspended gas distribution manifold for plasma chamber

Flow control valve for use in fabrication of semiconductor devic

Flow-stabilized wet scrubber system for treatment of process gas