Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate
2005-12-27
2005-12-27
Kackar, Ram N (Department: 1763)
Coating apparatus
Gas or vapor deposition
With treating means
C118S728000, C118S500000, C156S345520, C156S345510, C219S444100, C279S128000, C361S234000, C392S416000, C392S418000
Reexamination Certificate
active
06979369
ABSTRACT:
A supporting structure of a ceramic susceptor is provided, including a ceramic susceptor to be heated having a mounting face and a back face, and a ceramic supporting member joined with the back face of the susceptor. The supporting member has an outer wall surface, and a continuous and integral curved part formed between the outer wall surface and the back face of the susceptor. The curved part has a radius of curvature “R” in a range of 4 mm to 25 mm in the longitudinal direction of the supporting member, and a minimum wall thickness “t” in a range of 1 mm to 15 mm.
REFERENCES:
patent: 6160244 (2000-12-01), Ohashi
patent: 6261708 (2001-07-01), Ohashi et al.
patent: 2002/0144787 (2002-10-01), Yamaguchi
patent: 2001-250858 (2001-09-01), None
Goto Yoshinobu
Yamaguchi Kazuaki
Burr & Brown
Kackar Ram N
NGK Insulators Ltd.
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