Flame stabilizer for stagnation flow reactor

Details Flame stabilizer for stagnation flow reactor Flame stabilizer for stagnation flow reactor

1998-07-27

1999-09-14

King, Roy V.

Coating apparatus

Gas or vapor deposition

427446, C23C 1600, B05D 108

Patent

active

059517689

ABSTRACT:
A method of stabilizing a strained flame in a stagnation flow reactor. By causing a highly strained flame to be divided into a large number of equal size segments it is possible to stablize a highly strained flame that is on the verge of extinction, thereby providing for higher film growth rates. The flame stabilizer is an annular ring mounted coaxially and coplanar with the substrate upon which the film is growing and having a number of vertical pillars mounted on the top surface, thereby increasing the number of azimuthal nodes into which the flame is divided and preserving an axisymmetric structure necessary for stability.

REFERENCES:
Hahn et al, Appl. Phys. Lett. 68(15), pp. 2158-2160, Apr. 1996.
McCarty et al, Appl. Phys. Lett. 63(1), pp. 1498-1500, Sep. 1993.

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