Fixing member for evaporation apparatus

Details Fixing member for evaporation apparatus Fixing member for evaporation apparatus

2005-04-19

2005-04-19

Bueker, Richard (Department: 1763)

Coating apparatus

Gas or vapor deposition

Crucible or evaporator structure

C392S389000, C220S323000, C220S326000, C024S530000, C024S545000, C024S555000

Reexamination Certificate

active

06881271

ABSTRACT:
An electric heater is placed so as to cover an upper opening of a crucible. Then, a plurality of angle members are disposed along the side portions of the electric heater and are pressed and fixed by clamps. The clamp includes, at its bottom, a curved portion formed by bending a plate-like spring member into a convex shape, and generates pressing force between the curved portion and corresponding claw portions at the upper edge, thereby clamping the crucible.

REFERENCES:
patent: 1106837 (1914-08-01), Pfaehler
patent: 1134856 (1915-04-01), Husted
patent: 2380443 (1945-07-01), Ingie
patent: 4543467 (1985-09-01), Eisele et al.
patent: 5532102 (1996-07-01), Soden et al.
patent: 5552580 (1996-09-01), Pfost et al.
patent: 5803976 (1998-09-01), Baxter et al.
patent: 6562405 (2003-05-01), Eser et al.
patent: 20030085227 (2003-05-01), Azzarello
patent: 20030101937 (2003-06-01), Van Slyke et al.
patent: 2001-247959 (2001-09-01), None

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