Fixing structures and supporting structures of ceramic...

Details Fixing structures and supporting structures of ceramic... Fixing structures and supporting structures of ceramic...

2006-03-14

2006-03-14

Kackar, Ram N (Department: 1763)

Coating apparatus

Gas or vapor deposition

With treating means

C118S728000, C118S500000, C156S345520, C156S345510, C219S444100, C279S128000, C361S234000, C392S416000, C392S418000

Reexamination Certificate

active

07011712

ABSTRACT:
A supporting structure is provided, including a ceramic susceptor to be heated and having a mounting face and a back face. A ceramic supporting member is joined with the back face of the susceptor. The ceramic supporting member has an outer wall surface, a joining face joined with the susceptor and an end face opposing the joining face. A curved part is formed between the outer wall surface and back face, and has a radius of curvature R in a range of 4 mm to 25 mm in the longitudinal direction of the ceramic supporting member.

REFERENCES:
patent: 6160244 (2000-12-01), Ohashi
patent: 6261708 (2001-07-01), Ohashi et al.
patent: 2002/0144787 (2002-10-01), Yamaguchi
patent: 2001-250858 (2001-09-01), None

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