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Susceptor for semiconductor wafer processing

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Susceptor for vapor-phase growth system

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Susceptor in chemical vapor deposition reactors

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Susceptor structure for mounting processing object thereon

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Susceptor supporting construction

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Susceptor system

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Susceptor with bi-metal effect

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Susceptor with epitaxial growth control devices and...

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Susceptor with insulative inserts

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Susceptor with internal support

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Susceptorless semiconductor wafer support and reactor system...

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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System for fabricating a device on a substrate with a...

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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System for plasma treating a plastic component

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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System for processing a workpiece

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Target holder with mechanical scanning

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Thermal conditioning apparatus

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Thermal processing apparatus and process

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Thermally floating pedestal collar in a chemical vapor depositio

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Thin film forming equipment and method

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Thin-film forming apparatus with magnetic bearings and a non-con

Coating apparatus – Gas or vapor deposition – Work support
Patent

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