Susceptor supporting construction

Details Susceptor supporting construction Susceptor supporting construction

2006-02-14

2006-02-14

Hassanzadel, P. (Department: 1763)

Coating apparatus

Gas or vapor deposition

Work support

C118S725000, C118S500000, C361S234000, C219S444100, C219S544000, C156S345510, C156S345520, C279S128000

Reexamination Certificate

active

06997993

ABSTRACT:
A susceptor supporting construction has a susceptor for heating a member to be processed and a supporting member, in which an inner space is arranged, connected to the susceptor. A chamber having an opening is connected to the supporting member, the opening of the chamber is communicated with the inner space of the supporting member, and the inner space of the supporting member is sealed in an airtight manner with respect to an inner space of the chamber. The supporting member further has a tubular main portion, a diameter extending portion arranged at an end portion thereof to which the susceptor is faced, and one or more continuous round portions arranged between the main portion and the diameter extending portion, when viewed by an outer profile of a longitudinal section of the supporting member.

REFERENCES:
patent: 5688331 (1997-11-01), Aruga et al.
patent: 6423949 (2002-07-01), Chen et al.
patent: 2003/0183340 (2003-10-01), Yamaguchi et al.
patent: 2003/0183341 (2003-10-01), Yamaguchi et al.
patent: 8-73280 (1996-03-01), None

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