Susceptor with insulative inserts

Details Susceptor with insulative inserts Susceptor with insulative inserts

2011-06-14

2011-06-14

Chen, Keath T (Department: 1712)

Coating apparatus

Gas or vapor deposition

Work support

C361S234000

Reexamination Certificate

active

07959735

ABSTRACT:
A method and apparatus for reducing arcing in a plasma processing system when processing large area substrates which contain one or more holes. In one embodiment of the invention, a substrate support member includes an electrically insulating insert located beneath a hole in an insulating, large area substrate. The insulating insert is made of aluminum oxide, and is located within a hole in the support member such that the insert is disposed beneath a hole in a glass substrate. The substrate support member is made of aluminum with an anodized surface.

REFERENCES:
patent: 4872947 (1989-10-01), Wang et al.
patent: 5124717 (1992-06-01), Campanelli et al.
patent: 5309538 (1994-05-01), Larson
patent: 5366585 (1994-11-01), Robertson et al.
patent: 5558717 (1996-09-01), Zhao et al.
patent: 6024044 (2000-02-01), Law et al.
patent: 6110557 (2000-08-01), Weir et al.
patent: 6228438 (2001-05-01), Schmitt
patent: 6246567 (2001-06-01), Parkhe
patent: 6494958 (2002-12-01), Shamouilian et al.
patent: 6773562 (2004-08-01), Inagawa et al.
patent: 6847516 (2005-01-01), Kwon et al.
patent: 6893162 (2005-05-01), Vegny et al.
patent: 7086347 (2006-08-01), Howald et al.
patent: 2003/0031792 (2003-02-01), Won et al.
patent: 2003/0036877 (2003-02-01), Schietinger
patent: 2004/0190215 (2004-09-01), Weldon et al.
patent: 2005/0272273 (2005-12-01), Shang et al.
patent: 2006/0005771 (2006-01-01), White et al.
patent: 2006/0014842 (2006-01-01), Li et al.
patent: 2006/0057826 (2006-03-01), De Boer
patent: 2006/0060302 (2006-03-01), White et al.
patent: 2006/0185795 (2006-08-01), Choi et al.
patent: 2006/0207508 (2006-09-01), Leung
patent: 2006/0254512 (2006-11-01), Fink

Affiliated with

Also associated with

Rating

Susceptor with insulative inserts does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Susceptor with insulative inserts, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Susceptor with insulative inserts will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2728827