Target holder with mechanical scanning

Details Target holder with mechanical scanning Target holder with mechanical scanning

1983-06-16

1985-04-02

Smith, John D.

Coating apparatus

Gas or vapor deposition

Work support

118729, 118723, 118500, 2504922, 2504421, H01L 21265

Patent

active

045080569

ABSTRACT:
Target holder with mechanical scanning. The device comprises several target supports mounted on a plate, which rotates about an axis and means for displacing the supports relative to the plate, arranged in such a way that the radial displacement increment of a support between two consecutive passages in front of the beam is constant throughout the duration of a sweep between two end positions of the support.
Application to ion implantation on a silicon wafer.

REFERENCES:
patent: 2821158 (1958-01-01), Brown et al.
patent: 3858547 (1975-01-01), Bergfelt
patent: 3993909 (1976-11-01), Drews et al.
patent: 4274004 (1981-06-01), Kanai
Christensen, "Method & Apparatus for Depositing Resists", IBM Tech. Disclosure Bulletin, vol. 20, No. 10, Mar. 1978, pp. 3913-3914.

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