Substrate platform for a semiconductor substrate during rapid hi

Substrate processing apparatus and substrate processing method

Substrate processing apparatus, substrate holder, and...

Substrate receiving apparatus and method thereof

Substrate support for a thermal processing chamber

Substrate support for an evaporation installation

Substrate support for plasma processing

Substrate support having dynamic temperature control

Substrate support lift mechanism

Substrate support member for a processing chamber

Substrate support shield in wafer processing reactors

Substrate support with extended radio frequency electrode...

Substrate supporting apparatus

Substrate supporting apparatus for a CVD apparatus

Substrate-supporting device for semiconductor processing

Substrate-supporting device having continuous concavity

Superconducting films on alkaline earth fluoride substrates with

Support apparatus for semiconductor wafer processing

Support assembly with thermal expansion compensation

Support for wafer-shaped objects, in particular silicon wafers