Superconducting films on alkaline earth fluoride substrates with

Details Superconducting films on alkaline earth fluoride substrates with Superconducting films on alkaline earth fluoride substrates with

1994-07-27

1995-12-05

Bueker, Richard

Coating apparatus

Gas or vapor deposition

Work support

118726, 118500, 118728, C23C 1400

Patent

active

054725100

ABSTRACT:
A high frequency superconducting device structure is disclosed which comprises an alkaline earth fluoride substrate with a magnesium oxide lower buffer layer on the alkaline earth substrate and an upper buffer layer epitaxial template layer on the magnesium oxide layer for providing a template for epitaxial growth of a high temperature superconducting film on the upper buffer layer, providing reduced dielectric and conducting losses at high frequencies. The disclosed structure may be incorporated into a multi-chip module (MCM) for providing very high speed interconnections.

REFERENCES:
patent: 4701592 (1987-10-01), Cheung
patent: 5212148 (1993-05-01), Roas

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