Substrate support for an evaporation installation

Details Substrate support for an evaporation installation Substrate support for an evaporation installation

1997-03-14

1998-10-13

Bueker, Richard

Coating apparatus

Gas or vapor deposition

Work support

118730, 118503, C23C 1600

Patent

active

058206841

ABSTRACT:
The present invention relates to a concave substrate support for an evaporation installation, comprised of a substantially solid surface and provided with resilient clasps for holding substrates positioned against an inner surface of the support. The clasps are operable from an external surface of the support.

REFERENCES:
patent: 4971676 (1990-11-01), Doue

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