Substrate supporting apparatus

Details Substrate supporting apparatus Substrate supporting apparatus

1991-02-14

1994-06-07

Chiesa, Richard L.

Coating apparatus

Gas or vapor deposition

Work support

118 52, C23C 1654

Patent

active

053186346

ABSTRACT:
A rotatable shaft supports and imparts rotary motion to a susceptor supporting spider to locate the susceptor and any substrate mounted thereon within a reaction chamber during a CVD process. The spider includes a plurality of radially extending arms having upwardly directed pegs for engaging cavities in the underside of the susceptor and a hub for interconnection with the rotatable shaft.

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