Substrate-supporting device having continuous concavity

Details Substrate-supporting device having continuous concavity Substrate-supporting device having continuous concavity

2011-08-09

2011-08-09

Gramaglia, Maureen (Department: 1716)

Coating apparatus

Gas or vapor deposition

Work support

C118S715000, C118S722000, C118S7230AN, C156S345100, C156S345510

Reexamination Certificate

active

07993462

ABSTRACT:
A substrate-supporting device has a top surface for placing a substrate thereon composed of a plurality of surfaces separated from each other and defined by a continuous concavity being in gas communication with at least one through-hole passing through the substrate-supporting device in its thickness direction. The continuous concavity is adapted to allow gas to flow in the continuous concavity and through the through-hole under a substrate placed on the top surface.

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