Cluster beam thin film deposition apparatus with thermionic elec

Coating a substrate surface with a permeation barrier

Coating apparatus

Coating apparatus

Coating film formation apparatus and aging process apparatus

Coating for parts used in semiconductor processing chambers

Coaxial microwave applicator for an electron cyclotron resonance

Coaxial plasma processing apparatus

Coaxial resonant multi-port microwave applicator for an ECR plas

Cold wall chemical vapor deposition apparatus with a heater...

Cold-wall operated vapor-phase growth system

Collection devices for plasma immersion ion implantation

Combinatorial synthesis system

Compact process chamber for improved process uniformity

Compact process chamber for improved process uniformity

Compact, distributed inductive element for large scale...

Compound semiconductor vapor phase epitaxial device

Conductor treating single-wafer type treating device and...

Confinement of secondary electrons in plasma ion processing

Confinement ring assembly of plasma processing apparatus