Coating apparatus – Gas or vapor deposition – With treating means
Patent
1998-01-12
1999-11-02
Breneman, Bruce
Coating apparatus
Gas or vapor deposition
With treating means
118723MA, 118723ME, 156345, 31511121, 216 69, 216 70, 438726, 438728, 427569, C23C 1600, H01L 2100
Patent
active
059750146
ABSTRACT:
A method and apparatus employing a microwave applicator for use with an ECR plasma source for applications including etching and chemical vapor deposition is provided. A magnetic field is generated by magnets circumferentially arranged about a chamber that is symmetrical about its longitudinal axis. The microwave applicator, which comprises at least one pair of coaxial resonant multiport microwave antenna arrays, injects and distributes microwave power about a plasma forming portion of the chamber. The antenna arrays include a plurality of radiating stubs for radiating microwave power. The stubs are positioned along the arrays at predetermined intervals and selected orientations relative to a coaxial transmission line, for efficiently distributing microwave power uniformly about the plasma forming portion. The position and orientation of the radiating stubs cause microwave power to be launched into the plasma in the form of propagating electromagnetic waves with a polarization suitable for electron cyclotron heating. The applicator is coupled to a microwave power source that preferably supplies microwave power at a frequency of 2.45 GHz. A magnetic-field free region produces uniformity of plasma distribution in a plasma stream that approaches an outlet in the chamber. The plasma stream flows through the plasma forming region toward the specimen with characteristics of high density, uniformity over transverse dimensions larger than the specimen, and low plasma temperature, while operating at gas pressures which can be varied over a wide range.
REFERENCES:
patent: 4401054 (1983-08-01), Matsuo
patent: 5370765 (1994-12-01), Dandl
patent: 5483248 (1996-01-01), Milroy
patent: 5707452 (1998-01-01), Dandl
Alejandro Luz
ASM Japan K.K.
Breneman Bruce
Hill Robert Charles
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