Coating apparatus

Details Coating apparatus Coating apparatus

1990-06-15

1992-09-22

Bueker, Richard

Coating apparatus

Gas or vapor deposition

With treating means

118723, 427541, C23C 1648

Patent

active

051493772

ABSTRACT:
An apparatus for coating substrates by photolytic dissociation or decomposition of a coating material includes a reactor vessel. A UV radiation source and the substrate to be coated are both disposed in the reactor vessel.

REFERENCES:
patent: 4500565 (1985-02-01), Hiramoto
patent: 4516527 (1985-05-01), Sugioka
patent: 4825806 (1989-05-01), Tawada

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