Coating apparatus – Gas or vapor deposition – With treating means
Patent
1990-06-15
1992-09-22
Bueker, Richard
Coating apparatus
Gas or vapor deposition
With treating means
118723, 427541, C23C 1648
Patent
active
051493772
ABSTRACT:
An apparatus for coating substrates by photolytic dissociation or decomposition of a coating material includes a reactor vessel. A UV radiation source and the substrate to be coated are both disposed in the reactor vessel.
REFERENCES:
patent: 4500565 (1985-02-01), Hiramoto
patent: 4516527 (1985-05-01), Sugioka
patent: 4825806 (1989-05-01), Tawada
Esrom Hilmar
Kogelschatz Ulrich
Asea Brown Boveri Aktiengesellschaft
Bueker Richard
Greenberg Laurence A.
Lerner Herbert L.
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