Coating apparatus

Details Coating apparatus Coating apparatus

1980-03-28

1981-09-22

Kendall, Ralph S.

Coating apparatus

Gas or vapor deposition

With treating means

118724, 118726, 427 57, 4272556, 430272, 430311, C23C 1304, C23C 1312

Patent

active

042903840

ABSTRACT:
An apparatus and method for coating a substrate with a thin film of material. The coating material is converted to a mist by means of an ultrasonic nebulizer and transported by a carrier gas to a chamber which contains the substrate where the mist is allowed to settle onto the substrate under the force of gravity. Sonic means are also provided to increase the settling rate of the mist droplets to lessen the settling time. Means are also provided to maintain the volume and concentration of the coating material in the nebulizer chamber over successive coatings.

REFERENCES:
patent: 2694377 (1954-11-01), Pawlyk
patent: 2753800 (1956-07-01), Pawlyk
patent: 3158499 (1964-11-01), Jenkins
patent: 3805736 (1974-04-01), Foehring et al.
patent: 3840391 (1974-10-01), Spitz

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