Coating a substrate surface with a permeation barrier

Details Coating a substrate surface with a permeation barrier Coating a substrate surface with a permeation barrier

1995-02-02

1996-12-03

Breneman, R. Bruce

Coating apparatus

Gas or vapor deposition

With treating means

118723HC, 118723DC, 118726, C23C 1600

Patent

active

055803865

ABSTRACT:
A substrate surface is coated with a permeation barrier of inorganic material, which is vaporised from a crucible in a vacuum chamber evacuated to at least 10.sup.-3 mbar and precipitated on the substrate surface. An ionizing electron beam of low energy is thus passed through the gas phase of inorganic material with formation of a plasma, preferably in the direction running approximately parallel to the substrate surface. At least one low voltage electron beam gun with assigned electrode is incorporated in the vacuum chamber between the crucible and the substrate support. The main application is for coating plastic films for the packaging industry.

REFERENCES:
patent: 4448802 (1984-05-01), Buhl
patent: 4524717 (1985-06-01), Neumann
patent: 4917786 (1990-04-01), Ehrich
patent: 4951604 (1990-08-01), Temple
patent: 5031408 (1991-07-01), Horn
patent: 5346554 (1994-09-01), Suzuki

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