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Method of depositing a TaN seed layer

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Reexamination Certificate

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Method of depositing conductors in high aspect ratio apertures u

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent

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Method of depositing ferrite film

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method of depositing film and sputtering apparatus

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method of depositing nanoparticles for flux pinning into a...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method of depositing thin film of metal oxide by magnetron...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method of depositing thin films

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method of deposition of metal into cavities on a substrate

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method of detecting an end point of plasma treatment

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method of detecting arc discharges in a plasma process

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method of eliminating metal voiding in a titanium nitride/alumin

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method of encapsulating conductors

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method of enhancing hardness of sputter deposited copper films

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method of enhancing the performance of a magnetron sputtering ta

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method of fabricating a high dielectric constant transistor...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method of fabricating a magnetic recording medium

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent

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Method of fabricating a surface emitting laser with large area d

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method of fabricating a textured magnetic storage disk

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method of fabricating an EL display device, and apparatus...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method of fabricating boron containing coatings

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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