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Sheet plasma sputtering method and an apparatus for carrying out

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent

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Shield and collimator pasting deposition chamber with a side poc

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent

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Shield configuration for vacuum chamber

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent

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Shield for a physical vapor deposition chamber

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent

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Shutter disk and blade for physical vapor deposition chamber

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Reexamination Certificate

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Sidewall magnet improving uniformity of inductively coupled...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Silicon carbide coatings

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Silicon coating on air bearing surface for magnetic thin film he

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Silicon dot forming method and silicon dot forming apparatus

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Reexamination Certificate

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Silicon IC contacts using composite TiN barrier layer

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Single chamber sputtering assembly

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent

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Single source sputtering of thioaluminate phosphor films

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Reexamination Certificate

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Single source sputtering of thioaluminate phosphor films

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Reexamination Certificate

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SiO x :Si composite articles and methods of making same

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Reexamination Certificate

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Small epicyclic magnetron with controlled radial sputtering...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Reexamination Certificate

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Soft magnetic alloy film

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent

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Soft plasma ignition in plasma processing chambers

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Reexamination Certificate

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Soil-resistant coating for glass surfaces

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Reexamination Certificate

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Soil-resistant coating for glass surfaces

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Reexamination Certificate

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Solar management coating system including protective DLC

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Reexamination Certificate

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