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Method and apparatus for providing deposited layer...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method and apparatus for reactive sputtering employing two contr

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method and apparatus for reducing migration of conductive...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method and apparatus for reducing plasma nonuniformity...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method and apparatus for reducing target arcing during...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method and apparatus for reducing the first wafer effect

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method and apparatus for regulating a degree of reaction in a co

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method and apparatus for removing coating from substrate

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method and apparatus for removing coating from substrate

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method and apparatus for repairing lithography masks using a...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method and apparatus for sputter coating employing machine reada

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method and apparatus for sputter coating stepped wafers

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method and apparatus for sputter coating with variable...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method and apparatus for sputter coating with variable...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method and apparatus for sputter deposition of a semiconductor h

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method and apparatus for sputter deposition of multilayer films

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method and apparatus for sputter etch conditioning a ceramic bod

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method and apparatus for sputtering

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method and apparatus for sputtering a dielectric target or for r

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method and apparatus for sputtering a superconductor onto a subs

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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