Integrated sputtering target assembly
Interference layer system
Interference layer system
Interlayer dielectric process
Intermediate layer material of three-layer resist system and met
Inverted magnetron
Ion assisted deposition process including reactive source gassif
Ion beam deposition targets having an interlocking interface...
Ion beam for target recovery
Ion beam induced sputtered multilayered magnetic structures
Ion beam modification of residual stress gradients in thin...
Ion beam processing method and apparatus
Ion beam sputtering apparatus, method for forming a...
Ion implantation of thin film CrSi.sub.2 and SiC resistors
Ion vapour deposition apparatus and method
Ion-assisted magnetron deposition
Ion-beam machining method and apparatus
Ion-beam source with channeling sputterable targets and a...
Ion-beam sputtering apparatus and method for operating the same
Ionization film-forming method and apparatus