Sputtering device with a cathode with permanent magnet system
Sputtering electrode
Sputtering installation for the reactive coating of a substrate
Sputtering installation with two longitudinally placed...
Sputtering magnetron
Sputtering method and apparatus with optical monitoring
Sputtering method and apparatus with small diameter RF coil
Sputtering of lithium
Sputtering process and an apparatus for carrying out the same
Sputtering reactor and method of using an unbalanced magnetron
Sputtering shield
Sputtering system
Sputtering system
Sputtering system
Sputtering system
Sputtering system
Sputtering system for cathode sputtering apparatus
Sputtering system for deposition on parallel substrates
Sputtering system for optimizing quartz deposition uniformity
Sputtering target