Sputtering of lithium

Details Sputtering of lithium Sputtering of lithium

1995-12-05

1998-11-03

Nguyen, Nam

Chemistry: electrical and wave energy

Apparatus

Coating, forming or etching by sputtering

20429813, 20429819, 20419215, C23C 1434

Patent

active

058303367

ABSTRACT:
Lithium is sputtered from a target with a metallic lithium surface using an alternating sputtering potential with a frequency between about 8 and about 120 kHz, preferably about 10-100 kHz. The process can be used to apply lithium to electrochromic materials such as coatings on window glass.

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