Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Patent
1995-06-28
1997-03-25
Breneman, R. Bruce
Chemistry: electrical and wave energy
Apparatus
Coating, forming or etching by sputtering
20419212, C23C 1434
Patent
active
056140711
ABSTRACT:
A shield for use in a sputtering system. The shield includes a support having an inner expanse defining a two-dimensional array of cavities. The cavities are formed of two-dimensionally concave wall surfaces, where the intersections of the wall surfaces of adjacent cavities form a two-dimensional array of edges on the expanse. The shield minimizes the tendency of material deposited on the shield surface, such as sputtered carbon material, from flaking off during a sputtering operation. Also disclosed is a sputtering assembly that employs the shield.
REFERENCES:
patent: 5080774 (1992-01-01), Heitzer
patent: 5135629 (1992-08-01), Sawada et al.
patent: 5135634 (1992-08-01), Clarke
patent: 5228963 (1993-07-01), Rose
patent: 5240580 (1993-08-01), Henderson et al.
Ichikawa Koji
Mahvan Nader
Wilkinson David
Breneman R. Bruce
Dehlinger Peter J.
HMT Technology Corporation
McDonald Rodney G.
Mohr Judy M.
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