Dry etching method using (SN).sub.x protective layer

Dry etching method utilizing (SN).sub.x polymer mask

Dry etching method, chemical vapor deposition method, and appara

Dry etching of copper patterns

Dry etching of layer structure oxides

Dry etching of metal film

Dry etching of multi-layer structures

Dry etching of silicon carbide

Dry etching of silicon carbide

Dry etching patterning of electrical and optical materials

Dry etching polysilicon using a bromine-containing gas

Dry etching procedure

Dry etching process

Dry etching process

Dry etching process for gallium arsenide excellent in selectivit

Dry etching process for semiconductor

Dry etching process for semiconductor

Dry etching with hydrogen bromide or bromine

Dry etching with less particles

Dry granular composition for, and method of, polishing ferrous c