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MEMS device and fabrication method thereof

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
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MEMS device and method of making the same

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead
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MEMS device having a layer movable at asymmetric rates

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
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MEMS device having a movable electrode

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
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MEMS device having a trilayered beam and related methods

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
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MEMS device having flexures with non-linear restoring force

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
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MEMS device integrated chip package, and method of making same

Active solid-state devices (e.g. – transistors – solid-state diode – Integrated circuit structure with electrically isolated... – Passive components in ics
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MEMS device made of transition metal-dielectric oxide materials

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Electromagnetic or particle radiation
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MEMS device trench plating process and apparatus for through...

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal
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MEMS device wafer-level package

Active solid-state devices (e.g. – transistors – solid-state diode – Housing or package – With window means
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MEMS device with conductive path through substrate

Active solid-state devices (e.g. – transistors – solid-state diode – Housing or package – Insulating material
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MEMS device with integrated via and spacer

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified configuration
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MEMS device, MEMS device module and acoustic transducer

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
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MEMS device, MEMS device module and acoustic transducer

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
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MEMS devices and methods for inhibiting errant motion of...

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Magnetic field
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MEMS devices and methods of manufacture

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Magnetic field
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MEMS devices and methods of manufacture thereof

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
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MEMS devices having support structures

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Electromagnetic or particle radiation
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MEMS devices with voltage driven flexible elements

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
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MEMS element, MEMS device and MEMS element manufacturing method

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
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