MEMS device having a movable electrode

Details MEMS device having a movable electrode MEMS device having a movable electrode

2011-08-02

2011-08-02

Soward, Ida M (Department: 2822)

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

Physical deformation

C257S414000, C257S417000, C257S418000, C257S419000, C257S420000, C257S688000, C257SE29324

Reexamination Certificate

active

07989905

ABSTRACT:
A microelectromechanical system (MEMS) device includes a semiconductor substrate, a MEMS including a fixed electrode and a movable electrode formed on the semiconductor substrate through an insulating layer, and a well formed in the semiconductor substrate below the fixed electrode. The well is one of an n-type well and a p-type well. The p-type well applies a positive voltage to the fixed electrode while the n-type well applies a negative voltage to the fixed electrode.

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