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Hydrogen plasma photoresist strip and polymeric residue...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Hydrogen plasma photoresist strip and polymeric residue...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Hydrogen radical processing

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Patent

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Hydrogen silsesquioxane thin films for low capacitance structure

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Responsive to electromagnetic radiation
Patent

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Hydrogen thermal annealing method for stabilizing...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Hydrogen treatment enhanced gap fill

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Hydrogen treatment for threshold voltage shift of metal gate...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Hydrogen-based phosphosilicate glass process for gap fill of...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Hydrogen-doped polycrystalline group IV-based TFT having a...

Semiconductor device manufacturing: process – Gettering of substrate – By implanting or irradiating
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Hydrogen-free contact etch for ferroelectric capacitor...

Semiconductor device manufacturing: process – Having magnetic or ferroelectric component
Reexamination Certificate

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Hydrogen-free method of plasma etching indium tin oxide

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Hydrogen-less CVD TiN process for FeRAM VIA0 barrier...

Semiconductor device manufacturing: process – Having magnetic or ferroelectric component
Reexamination Certificate

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Hydrogen-terminated diamond MISFET and its manufacturing method

Semiconductor device manufacturing: process – Having diamond semiconductor component
Patent

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Hydrogenated oxidized silicon carbon material

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Patent

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Hydrogenated silicon carbide as a liner for self-aligning...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Hydrogenation of polysilicon thin film transistors

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – On insulating substrate or layer
Patent

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Hypercontacting

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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