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Planarization method using a slurry including a dispersant

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Planarization method using fluid composition including...

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
Reexamination Certificate

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Planarization method using hybrid oxide and polysilicon CMP

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
Reexamination Certificate

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Planarization method using hybrid oxide and polysilicon CMP

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
Reexamination Certificate

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Planarization of a gate electrode for improved gate...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
Reissue Patent

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Planarization of a non-conformal device layer in semiconductor f

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
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Planarization of a non-conformal device layer in semiconductor f

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Planarization of a patterned structure on a substrate using an i

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Patent

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Planarization of a polysilicon layer surface by chemical...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Planarization of a polysilicon layer surface by chemical...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material
Reexamination Certificate

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Planarization of copper damascene using reverse current...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Planarization of insulation film using low wettingness surface

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Patent

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Planarization of LOCOS through recessed reoxidation techniques

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Recessed oxide by localized oxidation
Reexamination Certificate

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Planarization of metal container structures

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Planarization of metal layers on a semiconductor wafer...

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
Reexamination Certificate

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Planarization of non-planar surfaces in device fabrication

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Planarization of non-planar surfaces in device fabrication

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Planarization of shallow trench isolation (STI)

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
Reexamination Certificate

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Planarization of shallow trench isolation by differential etchba

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
Patent

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Planarization of shallow- trench- isolation without chemical mec

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
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