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Fabrication of integrated circuits with borderless vias

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Fabrication of integrated circuits with borderless vias

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Fabrication of integrated circuits with isolation trenches

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Reexamination Certificate

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Fabrication of integrated devices using nitrogen implantation

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Fabrication of interconnects with two different thicknesses

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Patent

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Fabrication of large area x-ray image capturing element

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Responsive to electromagnetic radiation
Patent

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Fabrication of large grain polycrystalline silicon film by...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – On insulating substrate or layer
Reexamination Certificate

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Fabrication of laser diode array

Semiconductor device manufacturing: process – Making device or circuit emissive of nonelectrical signal – Packaging or treatment of packaged semiconductor
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Fabrication of lateral RF MOS devices with enhanced RF propertie

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Fabrication of lean-free stacked capacitors

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Fabrication of light emitting film coated fullerenes and...

Semiconductor device manufacturing: process – Making device or circuit emissive of nonelectrical signal – Making emissive array
Reexamination Certificate

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Fabrication of local damascene finFETs using contact type...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Fabrication of local interconnect lines

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Fabrication of low leakage-current backside illuminated...

Semiconductor device manufacturing: process – Gettering of substrate
Reexamination Certificate

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Fabrication of low resistance, non-alloyed, ohmic contacts...

Semiconductor device manufacturing: process – Forming schottky junction – Combined with formation of ohmic contact to semiconductor...
Reexamination Certificate

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Fabrication of metal contacts for deep-submicron technologies

Semiconductor device manufacturing: process – Forming schottky junction – Using platinum group metal
Reexamination Certificate

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Fabrication of metal fuse design for redundancy technology havin

Semiconductor device manufacturing: process – Making device array and selectively interconnecting – Using structure alterable to nonconductive state
Patent

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Fabrication of metal oxide structure for a gate dielectric...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
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Fabrication of metal oxide structures with different...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Fabrication of metal-ferroelectric-metal capacitors with a two s

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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