Fabrication of metal fuse design for redundancy technology havin

Details Fabrication of metal fuse design for redundancy technology havin Fabrication of metal fuse design for redundancy technology havin

1998-06-11

2000-08-08

Chaudhari, Chandra

Semiconductor device manufacturing: process

Making device array and selectively interconnecting

Using structure alterable to nonconductive state

438601, H01L 2182

Patent

active

06100118&

ABSTRACT:
A method of fabricating a metal guard ring (e.g., 139 149 159) around for a metal fuse 141 and fuse opening 88. The metal fuse 41 is formed from a second metal layer (M2) (or M3 or M4, etc.) and is connected to an underlying polysilicon layer 22 by fuse interconnections 129A 129B. The method comprises:

REFERENCES:
patent: 4536949 (1985-08-01), Takayama et al.
patent: 5444012 (1995-08-01), Yoshizumi et al.
patent: 5457059 (1995-10-01), Keller et al.
patent: 5538924 (1996-07-01), Chen
patent: 5567643 (1996-10-01), Lee et al.
patent: 5712206 (1998-01-01), Chen
patent: 5851903 (1998-12-01), Stamper

Affiliated with

Also associated with

Rating

Fabrication of metal fuse design for redundancy technology havin does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Fabrication of metal fuse design for redundancy technology havin, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Fabrication of metal fuse design for redundancy technology havin will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1149386