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Deposition method for Si-Ge epi layer on different...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Deposition method for wiring thin film

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Deposition method of a dielectric layer

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
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Deposition method of dielectric films having a low...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Deposition method of dielectric films having a low...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Deposition method of insulating layers having low dielectric...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Deposition method of insulating layers having low dielectric...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – On insulating substrate or layer
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Deposition method of insulating layers having low dielectric...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – On insulating substrate or layer
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Deposition method of TiN thin film having a multi-layer...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Deposition method with improved step coverage

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material
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Deposition method, method of manufacturing semiconductor...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Deposition methods

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
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Deposition methods

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of...
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Deposition methods

Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate
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Deposition methods and apparatuses providing surface activation

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Deposition methods for barrier and tungsten materials

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Deposition methods for barrier and tungsten materials

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Deposition methods using heteroleptic precursors

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Deposition methods utilizing microwave excitation

Semiconductor device manufacturing: process – Radiation or energy treatment modifying properties of...
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Deposition methods utilizing microwave excitation

Semiconductor device manufacturing: process – Radiation or energy treatment modifying properties of...
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