LandOfFree - US Patents - Listing for Semiconductor device manufacturing: process

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Atomic layer deposition of hafnium-based high-k dielectric

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate

Reexamination Certificate

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Atomic layer deposition of interpoly oxides in a...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate

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Atomic layer deposition of metallic contacts, gates and...

Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate – Amorphous semiconductor

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Atomic layer deposition of tantalum based barrier materials

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material

Reexamination Certificate

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Atomic layer deposition of tantalum-containing materials...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material

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Atomic layer deposition of titanium using batch type chamber...

Semiconductor device manufacturing: process – Making passive device – Stacked capacitor

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Atomic layer deposition of tungsten materials

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material

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Atomic layer deposition of Zr 3 N 4 /ZrO 2 films as gate...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate

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Atomic layer deposition of Zr x Hf y Sn 1-x-y O 2 films...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate

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Atomic layer deposition of Zr x Hf y Sn 1-x-y O 2 films...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate

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Atomic layer deposition processes for non-volatile memory...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate

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Atomic layer deposition processes for non-volatile memory...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate

Reexamination Certificate

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Atomic layer deposition systems and methods including metal...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers

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Atomic layer deposition systems and methods including...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material

Reexamination Certificate

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Atomic layer deposition tantalum nitride layer to improve...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material

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Atomic layer deposition using photo-enhanced bond...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching

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Atomic layer doping apparatus and method

Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate

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Atomic layer doping apparatus and method

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material

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Atomic layer profiling of diffusion barrier and metal seed...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material

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Atomic layer removal for high aspect ratio gapfill

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material

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