Process for a monolithically-integrated micromachined sensor...
Process for bonding a shell to a substrate for packaging a semic
Process for depositing a surface-wide layer through a mask and o
Process for fabricating micromechanical devices
Process for fabricating single crystal resonant devices that...
Process for fabricating single crystal resonant devices that...
Process for fabrication of 3-dimensional micromechanisms
Process for integrating dielectric optical coatings into...
Process for integrating dielectric optical coatings into...
Process for making a magnetoresistive magnetic sensor and sensor
Process for manufacture of microoptomechanical structures
Process for manufacturing a micromachined oscillating...
Process for manufacturing an apparatus that protects...
Process for manufacturing high-sensitivity capacitive and resona
Process for manufacturing high-sensitivity capacitive and...
Process for manufacturing mechanical, electromechanical and...
Process for manufacturing micromechanical and...
Process for manufacturing micromechanical components having a pa
Process for manufacturing microstructure
Process for producing micromechanical sensors