MEMS structure and method for fabricating the same

MEMS switch capping and passivation method

MEMS switch having hexsil beam and method of integrating...

MEMS/NEMS structure comprising a partially monocrystalline...

Metal contact RF MEMS single pole double throw latching switch

Metal diaphragm sensor with polysilicon sensing elements and met

Metal MEMS devices and methods of making same

Metal MEMS devices and methods of making same

Method and apparatus for fabrication of passivated...

Method and apparatus for MEMS device nebulizer lubrication...

Method and apparatus for microjoining dissimilar materials

Method and apparatus for protecting wiring and integrated...

Method and apparatus for switching high frequency signals

Method and apparatus for underfill of bumped or raised die

Method and apparatus for underfill of bumped or raised die

Method and apparatus for underfill of bumped or raised die

Method and apparatus for underfilling semiconductor devices

Method and forming a micromirror array device with a small...

Method and forming a micromirror array device with a small...

Method and system for sealing a substrate