Metal contact RF MEMS single pole double throw latching switch

Details Metal contact RF MEMS single pole double throw latching switch Metal contact RF MEMS single pole double throw latching switch

2007-08-27

2009-12-08

Nguyen, Ha Tran T (Department: 2829)

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

Physical stress responsive

Reexamination Certificate

active

07629194

ABSTRACT:
Apparatus for a micro-electro-mechanical switch that provides single pole, double throw switching action. The switch has two input lines and two output lines. The switch has a seesaw cantilever arm with contacts at each end that electrically connect the input lines with the output lines. The cantilever arm is latched into position by frictional forces between structures on the cantilever arm and structures on the substrate in which the cantilever arm is disposed. The state of the switch is changed by applying an electrostatic force at one end of the cantilever arm to overcome the mechanical force holding the other end of the cantilever arm in place.

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Sun, Xi-Qing, et al., “A Bistable Microrelay Based on Two-Segment Multimorph Cantilever Actuators,”The Eleventh Annual International Workshop on Micro-electro Mechanical Systems, pp. 154-159 (Jan. 25-29, 1998).

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