Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
Reexamination Certificate
2005-07-26
2005-07-26
Ho, Hoai (Department: 2818)
Semiconductor device manufacturing: process
Making device or circuit responsive to nonelectrical signal
Physical stress responsive
C359S291000, C508S524000
Reexamination Certificate
active
06921680
ABSTRACT:
A nebulization system, which creates a uniform fog of tiny suspended liquid droplets, to lubricate the surfaces of MEMS devices. These droplets fall over the edge of a baffle and are then mixed with an umbrella-like sheet of N2turbulation gas to generate a uniform cloud of droplets that fill a passivation chamber. The MEMS device is then positioned in this uniform cloud of lubricant droplets for a specified amount of time, thereby uniformly lubricating all the surfaces of the device. The system uses a laser monitoring approach to control the uniformity of the lubricant cloud by providing feedback to the system to control the flow of gases. The system also equalizes the pressure around the sample device seal to prevent gases from entering or exiting the chamber and thereby influencing the environment inside the chamber.
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Brady III Wade James
Brill Charles A.
Ho Hoai
Hoang Quoc
Telecky , Jr. Frederick J.
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