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Silicon oxycarbide substrates for bonded silicon on insulator

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Having semi-insulating component
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Silicon shallow trench etching with round top corner by...

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
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Silicon strain engineering accomplished via use of specific...

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
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Silicon-enriched shallow trench oxide for reduced recess during

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
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Silicon-on-insulator (SOI) transistor having partial hetero...

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
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Silicon-on-insulator islands and method for their formation

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Total dielectric isolation
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Silicon-on-insulator islands and method for their formation

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Total dielectric isolation
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Silicon-on-insulator substrate and a method for fabricating the

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Total dielectric isolation
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Silicon-on-insulator wafer and method of manufacturing the same

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Total dielectric isolation
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Silicon-oxynitride-oxide (SXO) continuity film pad to...

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Recessed oxide by localized oxidation
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Silicon-ozone CVD with reduced pattern loading using...

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
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Simox substrate and method for production thereof

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Total dielectric isolation
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SIMOX using controlled water vapor for oxygen implants

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Implanting to form insulator
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SIMOX using controlled water vapor for oxygen implants

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Total dielectric isolation
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Simplified method to reduce or eliminate STI oxide divots

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
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Simplified shallow trench isolation formation with no polish sto

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
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Single and dual damascene techniques utilizing composite...

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive...
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Single electron transistor using porous silicon and...

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Total dielectric isolation
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Smoothing method for cleaved films made using a release layer

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Total dielectric isolation
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Soft edge induced local oxidation of silicon

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
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