Silicon oxycarbide substrates for bonded silicon on insulator
Silicon shallow trench etching with round top corner by...
Silicon strain engineering accomplished via use of specific...
Silicon-enriched shallow trench oxide for reduced recess during
Silicon-on-insulator (SOI) transistor having partial hetero...
Silicon-on-insulator islands and method for their formation
Silicon-on-insulator islands and method for their formation
Silicon-on-insulator substrate and a method for fabricating the
Silicon-on-insulator wafer and method of manufacturing the same
Silicon-oxynitride-oxide (SXO) continuity film pad to...
Silicon-ozone CVD with reduced pattern loading using...
Simox substrate and method for production thereof
SIMOX using controlled water vapor for oxygen implants
SIMOX using controlled water vapor for oxygen implants
Simplified method to reduce or eliminate STI oxide divots
Simplified shallow trench isolation formation with no polish sto
Single and dual damascene techniques utilizing composite...
Single electron transistor using porous silicon and...
Smoothing method for cleaved films made using a release layer
Soft edge induced local oxidation of silicon