Line edge roughness reduction for trench etch
Line-to-line reliability enhancement using a dielectric...
Line-to-line reliability enhancement using a dielectric...
Liner for tungsten/silicon dioxide interface in memory
Liner with poor step coverage to improve contact resistance...
Liquid crystal display device and method for manufacturing...
Liquid phase deposition of a silicon oxide layer for use as...
Lithographic method for creating damascene metallization layers
Lithographic template and method of formation and use
Lithography and etching process
Local interconnect
Local interconnect formed using silicon spacer
Local interconnect manufacturing process
Local interconnect patterning and contact formation
Local interconnect structures and methods for making the same
Local interconnect structures for integrated circuits and...
Local interconnect structures for integrated circuits and...
Local interconnection method and structure for use in...
Local metallization and use thereof in semiconductor devices
Local multilayered metallization