Method for damascene formation using plug materials having...

Method for damascene process

Method for damascene process

Method for decreasing CHC degradation

Method for decreasing contact resistance of an electrode...

Method for decreasing the resistivity of the gate and the...

Method for defining windows with different etching depths...

Method for depositing a coating having a relatively high...

Method for depositing a diffusion barrier for copper...

Method for depositing a flow fill layer on an integrated circuit

Method for depositing a low k dielectric film (K>3.5) for...

Method for depositing a low-resistivity titanium-oxynitride (TiO

Method for depositing a metal layer on a semiconductor...

Method for depositing a platinum layer on a silicon wafer

Method for depositing a tungsten silicide layer

Method for depositing a two-layer diffusion barrier

Method for depositing an adhesion/barrier layer to improve...

Method for depositing an integrated circuit tungsten film...

Method for depositing and etching ruthenium layers

Method for depositing cobalt