Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Patent
1997-08-19
1999-11-09
Niebling, John F.
Semiconductor device manufacturing: process
Coating with electrically or thermally conductive material
To form ohmic contact to semiconductive material
438239, 438650, 438658, 438660, H01L 21283, H01L 21477
Patent
active
059813903
ABSTRACT:
The present invention relates to a method of depositing a platinum thin-film on a silicon wafer. The method includes the steps of depositing a platinum layer on an insulating oxide layer under an oxidation atmosphere to form a mixture film consisted of platinum grains, platinum oxide grains and oxygen adhered to those grains (hereinafter, "the mixture film" to be referred as "oxygen containing platinum thin-film"); depositing an additional platinum thin-film to a desired thickness on the oxygen containing platinum thin-film under a complete inert atmosphere; and annealing the silicon substrate at a temperature of 400 to 1,300.degree. C. in order to remove oxygen present in the independent form or in platinum oxide form within the oxygen containing platinum thin-film and to stabilize the entire platinum thin-film. The oxygen containing platinum thin-film layer serves as a glue layer during the depositing step of additional platinum thin-film layer and is converted into pure platinum condition after the annealing step, whereby the silicon substrate substantially does not have any glue layer between the platinum layer and the insulating layer of the silicon substrate.
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Oxygen Induced Preferred Orientation of DC Sputtered Platinum--M. Hecq and A. Hecq, J. Vac. Sci. Technol. 18(2), Mar. 1981, p 219-222.
Chun Dong il
Ha Jo Woong
Kim Min Hong
Lee Dong Su
Park Dong Yeon
Nguyen Ha Tran
Niebling John F.
Tong Yang Cement Corporation
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