PECVD process for ULSI ARL

Pendeoepitaxial methods of fabricating gallium nitride...

Peripheral processing method and method of manufacturing a...

Phosphorous-doped silicon dioxide process to customize...

Photo-assisted remote plasma apparatus and method

Photomask and method for manufacturing the same

Photopolymerization-based fabrication of chemical sensing films

Photoresist application over hydrophobic surfaces

Photoresist composition for forming an insulation film,...

Photoresist scum free process for via first dual damascene...

Photosensitive lacquer for providing a coating on a...

Physical vapor deposition apparatus with modified shutter...

Planarization for integrated circuits

Planarization for integrated circuits

Planarization of non-planar surfaces in device fabrication

Planarization of non-planar surfaces in device fabrication

Planarization process

Planarization using plasma oxidized amorphous silicon

Plasma chamber equipped with temperature-controlled focus...

Plasma composition for selective high-k etch